Oxford Plasmalab 80 Plus ICP

Plasma Etchers & PECVD
Model:
Oxford Plasmalab 80 Plus ICP for sale
Price:
Request Price Quote     ID#:  4311
Picture:
Single Chamber ICP, non-load locked, 200mm platen, All-New Oxford PLC controller installed with Windows 10.
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Details:

OXFORD PLASMALAB 80 PLUS ICP ETCHER consisting of:

- Model: Plasmalab 80 Plus RIE/ICP
- Single Chamber, non-load locked
- Platen: 200mm diameter
- New Windows 10 Operating Software ($25,000 upgrade included)
- New PLC with latest Oxford Software
- (Qty 2) RFX600 RF Generators
- Leybold D65BCS Rough Pump (professionally rebuilt)
- Adixen ATP400HPC Turbo Pump (professionally rebuilt)
- System Chiller (professionally rebuilt)
- System Dimensions: 23"x40"x59" (LxWxH)
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)


GAS CONFIGURATION:
Gas 1: O2 100sccm
Gas 2: CF4 100sccm
Gas 3: Ar 100sccm
Gas 4: N2 100sccm
Gas 5: N2 100sccm
Gas 6: N2 100sccm


REFURBISHMENT PROCESS FOR OXFORD PLASMALAB 80 consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.


Delivery:

8-12 weeks

Price:
      ID#:  4311