Plasmatherm 790 PECVD

Plasma Etchers & PECVD
Model:
Plasmatherm 790 PECVD for sale
Price:
Request Price Quote     ID#:  4221
Picture:
         200mm Wafer Capable, Non Load-Locked Chamber
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Details:

PLASMATHERM 790 PECVD SYSTEM consisting of:

- Model: 790
- PECVD Chamber with 8" Platen
- To be set up for 8"/200mm wafers
- Manual Wafer Load Chamber (Non-Load Lock)
- RFPP Model RF5S generator ( 13.56 MHZ, 500 Watt ) or equivalent
- Substrate Heat
- System Computer, Keyboard and Mouse
- Brand New LCD Monitor
- Edwards QDP80 Vacuum Pump with Blower (Professionally Rebuilt) or equivalent
- System Chiller
- Watlow Series 988 Controller
- Emergency Shut Off Button (EMO)
- Electrical Power Box
- System Power: 208V, 3PH, 60Amp, 50/60Hz
- Operations Manual
- Refurbished to Meet Original Plasmatherm 790 specs

Gas Configuration:
SiH4
N2O
O2
NH3
N2
C2F6

ClassOne Support Worldwide of Plasmatherm Etchers:

- ClassOne Supports all our Used and Refurbished Plasmatherm PECVD Systems with Spare Parts and Service Worldwide
- Installation & Training available Worldwide

Condition:

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.


Delivery:

14-16 weeks

Price:
      ID#:  4221