Plasmatherm 790 PECVD System for sale

Process Equipment

Plasmatherm 790 PECVD System

Model:

Price:

Request Price Quote ID#: 3368

Picture:

PECVD Chamber, up to 150mm wafer capable, Non-Load Locked Chamber

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Details:

PLASMATHERM 790 PECVD SYSTEM consisting of:

- Model: 790
- PECVD Chamber
- Capable of processing up to 6"/150mm wafers
- Currently set for: 4"/100mm (single wafer)
- Manual Wafer Load Chamber (Non-Load Lock)
- RFPP LF-5 RF Generator, Low Frequency, 50-460 kHz
- System Computer, Keyboard and Mouse
- Brand New LCD Monitor
- Edwards QDP80 Vacuum Pump with Blower (Professionally Rebuilt)
- System Chiller
- Watlow Series 945 Controller
- Emergency Shut Off Button (EMO)
- Electrical Power Box
- System Power: 208V, 3PH, 60Amp, 50/60Hz
- Operations Manual
- Serial Number: PTI-78177F

- Refurbished to Meet Original Plasmatherm 790 specs
- Available for Full Inspection and Demonstration at ClassOne!
- Our Refurbishment Process: http://www.classoneequipment.com/content/etching-systems

Gas Configuration:
- Process Gas Helium (He): 5~20 psig
- Process Gas Ammonia (NH3): 5~20 psig
- Process Gas Silane (2%SiH4/98%N2): 5~20 psig
- Machine Gas (fluid input Panel) Nitrogen (N2): 5~7 psig @1 slpm
- Cleaning Gas Halocarbon-Oxygen (92%CF4/8%O2): 5~20 psig
- Vent/Vacuum Bleed Gas Nitrogen (N2): 5~7 psig @ 10sccm
- Flush Gas Nitrogen (N2): 15~20 psig @ 1 slpm

ClassOne Support Worldwide of Plasmatherm Etchers:

- ClassOne Supports all our Used and Refurbished Plasmatherm PECVD Systems with Spare Parts and Service Worldwide
- Installation & Training available Worldwide

Vintage:

n/a

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.

Delivery:

6-8 weeks

Price:

ID#: 3368