Plasmatherm 790 Dual Chamber RIE for sale

Process Equipment

Plasmatherm 790 Dual Chamber RIE

Model:

Price:

Request Price Quote ID#: 3403

Picture:

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Details:

PLASMATHERM 790 DUAL CHAMBER RIE consisting of:

- Model: 790 RIE
- 2 RIE chambers
- Non load-locked chambers
- Electrodes: 240mm diameter
- Max wafer size capable: 8"/200mm
- RFPP 500W RF Generator
- 500W RF Match
- AMN Power Supply
- ION Gauge Controller Type 290
- Leybold 361C Turbo Pump (Qty 1)
- Leybold NT 150/360 Controller
- MKS 1160B MFC's: 7 installed (can hold up to 16 MFCs)
- Operator Manual and Documentation
- Refurbished to meet original specifications

Gas Configuration consists of:

- MFC 1: Range: 200 SCCM, Gas: N2
- MFC 2: Range: 100 SCCM, Gas: N2
- MFC 3: Range: 50 SCCM, Gas: N2
- MFC 9: Range: 50 SCCM, Gas: BCL3
- MFC 10: Range: 50 SCCM, Gas: CL2
- MFC 11: Range: 100 SCCM, Gas: N2
- MFC 12: Range: 100 SCCM, Gas: N2

Vintage:

n/a

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Meet Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.

Delivery:

8-10 weeks

Price:

ID#: 3403