Plasmatherm 790 RIE

PLASMATHERM 790 RIE consisting of:


- Model: 790 RIE
- Non load-locked chamber
- Electrodes: 240mm diameter
- Max wafer size capable: 8"/200mm
- RFPP 500W RF Generator
- 500W RF Match
- AMN Power Supply
- ION Gauge Controller Type 290
- Leybold 361C Turbo Pump (Qty 1)
- Leybold NT 150/360 Controller
- MKS 1160B MFC's
- Operator Manual and Documentation
- Refurbished to meet original specifications



Gas Configuration consists of:

- MFC 1: Range: 200 SCCM, Gas: N2
- MFC 2: Range: 100 SCCM, Gas: N2
- MFC 3: Range: 50 SCCM, Gas: N2
- MFC 4: Range: 50 SCCM, Gas: BCL3
- MFC 5: Range: 50 SCCM, Gas: CL2
- MFC 6: Range: 100 SCCM, Gas: N2
- MFC 7: Range: 100 SCCM, Gas: N2

N/A

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

8-10 weeks