Plasmatherm SLR-720 RIE
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PLASMATHERM SLR-720 RIE consisting of:
- Model: SLR-720
- Single chamber with load lock
- Currently set to run 6"/150mm Wafers
- Can process up to 8"/200mm wafers
- 11" Electrode
- Chlorine Etch Chemistries
- Additional Passivation Chemistries for controlled Isotropic Aluminum Features
- Leybold TMP 361C Turbo Pump
- AEI/RFPP RF5S 500W RF Generator
- Leybold Trivac D40BCS Vacuum Pump
- Leybold Trivac D30AC/OXY Vacuum Pump
- Neslab HX-75 Recirculating Chiller
- D-Square Power Box
- Process Software
- MKS 1159B MFC's (Qty 8 installed)
- Set of Operation and Maintenance Manuals
- Gas Configuration (8 MFCs):
1= N2
2= H2
3= BCl3
4= Cl2
5= CHF3
6= SF6
7= O2
8= Ar
REFURBISHED TO MEET OEM SPECIFICATIONS:
- Chamber disassembled and receives full wet clean.
- All Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to OEM and customer specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- Transport locks installed; all system components carefully packed, labeled, and professionally crated.
N/A
Excellent condition guaranteed.
This system will be delivered meeting factory specifications.
Available for full inspection and demo at ClassOne's facility.
6-8 weeks
