Plasmatherm SLR-770 ICP
You might also like:
PLASMATHERM / UNAXIS SLR-770 ICP SYSTEM consisting of:
- Model: SLR-770 ICP
- Load Locked
- Max Wafer Size: 8"/200mm
- End Point Detector
- Leybold Turbovac MAG 900 Turbo Pump
- Edwards IQDP40 Dry Pump
- Neslab Chiller
- Electrical Breaker Box
- Serial Number: PTI-81104-F
- Vintage: August 28, 2000
- Full and Complete System
- Excellent Condition Guaranteed
Gas Configuration:
- Cl2 @ 100 SCCM
- Cl2 @ 20 SCCM
- HBR @ 100 SCCM
- H2 @ 100 SCCM
- N2 @ 60 SCCM
- Ar @ 100 SCCM
- N2 @ 100 SCCM
- N2 @ 20 SCCM
REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:
Every Oxford, Plasmatherm, and STS plasma system we supply undergoes a stringent refurbishing process. The refurbishment is carried out by factory trained technicians to the most exacting standards, as follows.
- All subassemblies are disassembled, cleaned, serviced, tested, reassembled and adjusted as follows:
- Chamber disassembled and receives full wet clean.
- All Chamber o-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to OEM and customer specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- Transport locks installed; all system components carefully packed, labeled, and professionally crated.
2000
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
8 weeks
