Hitachi S-7800H SEM

Hitachi S-7800H SEM

Other Process
Model:
Hitachi S-7800H SEM for sale
Price:
Request Price Quote     ID#:  3863
Picture:
8"/200mm Capable, Manual Wafer Load, Refurbished by Hitachi Trained Technicians
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Details:

HITACHI S-7800H CD SEM consisting of:
 
- Manufacturer:  Hitachi
- Model:  S-7800H CD SEM
- Wafer Size:  8"/200mm 
- Manual wafer loading
- Resolution:  5nm at 1kv
- Reproducible Precision of Measurement:  Static 3 Sigma 0.010um
- Reproducible Precision of Positioning:  X & Y Stage within +/- 15um
- Precision of the Stage Rotation:  X & Y within +/- 60um
- Prealignment of Stage:  X & Y +/- 15um
- Throughput:  5 Wafers/Hour
- Oxford INCAx-Sight EDX
- Stage Movable Range:
     X: 0 ~ 200mm
     Y: 0 ~ 200mm
     Z: 4 ~ 12mm
     R: 0 ~ 360° T: 0 ~ 60°
- Vacuum Pumps
- Chiller
- Transformer
- Full and Complete System
- Operations Manual and Documentation
- Refurbished by Hitachi factory trained technicians
 
 

Condition:

Excellent Condition Guaranteed. 
Fully Refurbished to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specifications Guarantee. 
30 Day Right of Return.


Delivery:

8-10 weeks

Price:
      ID#:  3863