Semitool Spray Acid Tool (SAT)
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Semitool 3-Chamber Spray Acid Tool (SAT) consisting of:
- Wafer size: 6"/150mm cassettes
- 3-chamber Spray Acid Tool (SAT)
- Chamber 1 and 2 are Spray Acid Chambers (teflon chamber)
- Chamber 3 is Spin Rinse Dryer (stainless steel bowl)
- Chemical Delivery Unit (CDU), 5-bay
- Previously used chemicals: H2SO4, H2O2, HF, HCL, NH4OH
- 3 tank system (1 Hot DI tank and 2 heated chemical tanks)
- 4 pumps
- Hot DI Water loop
- Dedicated HF drain
- Dedicated chemical waste drain
- Dedicated industrial drain
- Semitool 202 Controller
- System Dimensions: Main: 72"x46"x66"
- CDU Dimensions: 88"x28.5"x32" (LxWxH)
- Power Requirements: 220/380V, 50/60hz
- Refurbished by Semitool factory trained technician!
- Available for full inspection and demonstration!
N/A
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
8-10 weeks
