Semitool Spray Acid Tool (SAT)

SEMITOOL SPRAY ACID TOOL (SAT) consisting of:

- Wafer Size: 6"/150mm Cassettes
- 3-Chamber Spray Acid Tool (SAT)
- Chamber 1 and 2 are Spray Acid Chambers (teflon chamber)
- Chamber 3 is Spin Rinse Dryer (stainless steel bowl)
- Chemical Delivery Unit (CDU), 5-Bay
- Previously used chemicals: H2SO4, H2O2, HF, HCL, NH4OH
- 4 Tank System (3 heated chemical tanks, 1 Hot DI tank)
- 6 Pumps
- Hot DI Water Loop
- Dedicated HF Drain
- Dedicated Chemical Waste Drain
- Dedicated Industrial Drain
- Semitool 302 Controller
- Operators Manual

- Refurbished to OEM Specifications by Semitool Factory Trained Technician
- Available for Full Inspection and Demonstration at ClassOne!

SEMITOOL REFURBISHMENT PROCESS consists of:

- All subassemblies disassembled, cleaned, serviced, reassembled, tested
- All solenoid valves replaced with brand new
- All nozzles replaced with brand new
- Door Seal replaced with brand new
- All supply lines cleaned or replaced with new
- All seals cleaned or replaced with new
- All filters replaced with new
- Rotor Stop Positioners tested and replaced as necessary
- Window replaced with new (as necessary)
- Start/Stop Switches replaced with new, as necessary
- Blanket Heaters replaced with new, as necessary
- Nitrogen Pressure Sensors replaced as necessary.
- Bowl inspected and sent to be electropolished
- Any worn or damaged parts are repaired or replaced
- Machine covers replaced as needed
- All work performed by former Semitool factory trained technicians
- Machine is fully tested to verify compliance to specifications
- System de-installed following Semitool factory procedures
- System transport locks installed; system prepared for shipment

N/A

Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.

8-10 weeks