SEMITOOL 480S SRD consisting of:
- Model: 480S
- Max Wafer Size: 8"/200mm
- Single Stack SRD
- Front-Loading Spin Rinse Dryer (SRD)
- PSC-102 Controllers
- Resistivity Monitors (RM-20)
- Emergency Off Power (EMO)
- Single bolt rotor design
- N2 Heaters
- Anti Static with N2 Purge (CY-20)
- EMO Button
- Power On/Off Buttons
- Start/Stop Buttons
- Operating Manuals for Semitool 480S
- All our Semitool SRDs are refurbished to meet factory specifications.
SEMITOOL REFURBISHMENT PROCESS consists of:
- All subassemblies disassembled, cleaned, serviced, reassembled, tested
- All solenoid valves replaced with brand new
- All nozzles replaced with brand new
- Door Seal replaced with brand new
- All supply lines cleaned or replaced with new
- All seals cleaned or replaced with new
- All filters replaced with new
- Rotor Stop Positioners tested and replaced as necessary
- Window replaced with new (as necessary)
- Start/Stop Switches replaced with new, as necessary
- Blanket Heaters replaced with new, as necessary
- Nitrogen Pressure Sensors replaced as necessary.
- Bowl inspected and sent to be electropolished
- Any worn or damaged parts are repaired or replaced
- Machine covers replaced as needed
- All work performed by former Semitool factory trained technicians
- Machine is fully tested to verify compliance to specifications
- System de-installed following Semitool factory procedures
- System transport locks installed; system prepared for shipment
- System packed: all components carefully packed and labeled