Semitool LT-210C Cu Plating System
SEMITOOL LT-210C PLATING SYSTEM consisting of:
- Model: LT-210C / Paragon
- Fully Automated Copper Plating System (ECD)
- Previously used for Copper Plating
- Setup for 6"/150mm wafers
- 3 Copper Plating Chambers
- 3 Pre-Wet & SRD Chambers
- 1 Large Plating Tank delivering to 3 plating chambers
- 4-Bay CDU (Chemical Delivery System)
- 4-Bottle ACMS (Automatic Chemical Management System) for additives with IVEK MultiDispense 900 Controller
- IWAKI MD-WMD Series Mechanical Pump For Plating
- Dynatronix PMC-10-20-60 Pulse Power Supply
a. Model #: PMC106/1PR-20-60
b. 6-cell power supply
- Front & Rear Touch Screen Monitors
- Acid Pre-Wet
- DI Pre-Wet
- Pre-Aligner
- Wafer Mapping
- Pumping Station
- Remote Power Box (Semitool model: 206123-01)
- 2 Photohelics
- Fire Retardant Poly Pro (FRPP)
- Operations Manuals and Documentation
- Available for full inspection and demonstration at ClassOne Equipment in Atlanta, Georgia
- ClassOne has core expertise on Semitool Wet Process Equipment with former Semitool technicians on staff, spare parts for support, and a large inventory of Semitools in stock in Atlanta, GA!
- Learn more about our Expertise in Semitool: http://www.classoneequipment.com/content/semitool-wet-process-equipment.
1999
Fully Reconditioned to Meet Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
12-16 weeks
