Semitool Sirius HydrOzone
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SEMITOOL SIRIUS HYDROZONE SYSTEM consisting of:
- Model: Sirius HydrOzone
- Wafer Size: 150mm & 200mm wafer capable
- Process: DI water/ozone
- Rinse: DI water with ammonium hydroxide
- Dry: N2
- 50-wafer capacity (dual cassette)
- Spray processing chamber.
- Uses a minimal amount of deionized water and ozone
- Low cost, low environmental impact process used for photoresist stripping, photolithography rework and organic cleans
- Does not require the use of sulfuric acid with its related delivery and disposal costs
- Manually loaded semi-automated system with a 50 wafer capacity spray processing chamber.
- Power: 208 VAC, 3 Phase, 5 wire, 60 Hz, 45 A
- Manufacturer Serial #: 219384
- Year of Manufacture: 2004
- Operators Manual and Documentation
- Fully Refurbished to OEM Semitool Sirius Specifications
SEMITOOL REFURBISHMENT PROCESS consists of:
- All subassemblies disassembled, cleaned, serviced, reassembled, tested
- All solenoid valves replaced with brand new
- All nozzles replaced with brand new
- Door Seal replaced with brand new
- All supply lines cleaned or replaced with new
- All seals cleaned or replaced with new
- All filters replaced with new
- Rotor Stop Positioners tested and replaced as necessary
- Window replaced with new (as necessary)
- Start/Stop Switches replaced with new, as necessary
- Blanket Heaters replaced with new, as necessary
- Nitrogen Pressure Sensors replaced as necessary.
- Bowl inspected and sent to be electropolished
- Any worn or damaged parts are repaired or replaced
- Machine covers replaced as needed
- All work performed by former Semitool factory trained technicians
- Machine is fully tested to verify compliance to specifications
- System de-installed following Semitool factory procedures
- System transport locks installed; system prepared for shipment
- System packed: all components carefully packed and labeled
2004
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
8-10 weeks
