Service and Support for KLA-Tencor SP1 systems

ClassOne Equipment provides service and maintenance solutions for KLA-Tencor Surfscan SP1 systems. We provide a full suite of services including; laser replacement, decommission, installation, and preventative maintenance services.

ClassOne Equipment provides service and maintenance on the following KLA SP1® systems:

• KLA SP1 Classic
• KLA SP1 TBI
• KLA SP1 DLS

Some of the major service options offered include:

• Laser Replacement and alignment      
• Sustaining support, training, and /or service contracts
• Provide a Bank of Hours option to minimize tool down time
• Preventative Maintenance (PM) contracts
• De-installation and tool moves with equipment lockdowns
• Installation Qualification
• Warranty Service
• Refurbishment and /or Reconfiguration of used KLA SP1 System

For more information on our KLA Surfscan SP1 service and maintenance solutions please contact us!