SPTS MPX ASE-HRM ICP PRO Etcher

SPTS MPX ASE-HRM ICP PRO ETCHER consisting of:

Configuration:
- Model: MPX ICP PRO
- Process Chamber: ASE-HRM
- ASE-HRM chamber: High Rate Magnetic source achieves over three times the etch rates versus the original Bosch process
- Process: High Rate Deep Silicon Etch
- Operating software: Windows
- Max wafer size capable: 200mm
- Voltage: 208V 60Hz 3Ph

Vacuum Load-lock For Single Chamber MPX systems (MESC):
- Carousel Load Lock (200mm)
- Chamber lid temperature control
- Fully automatic transfer of substrates between the load-lock and the process chamber

MPX ICP Process Chamber:
- Production proven single wafer process chamber
- Balun Coil for High Rate Etch
- Turbo Pump
- VAT Pendulum Valve
- Backside Helium Cooling
- Remote sealed extracted gas box with orbitally welded gas lines
- Electronics cabinet
- LCD flat panel monitor
- Fully automatic multistep processing or manual operation
- High Frequency RF Generator
- Low Frequency RF Generator
- Vacuum Pump (Load Lock)
- Vacuum Pump (Chamber)
- Chiller
- System Cables (full set)

- Operations Manuals
- Refurbished to excellent condition by SPTS factory trained technicians.

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne. 
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.  

8-12 weeks