STS Multiplex ICP ASE Etcher for sale

Process Equipment

STS Multiplex ICP ASE Etcher

Model:

Price:

Request Price Quote ID#: 3256

Picture:

Deep Silicon Etch, Mechanical Wafer Clamp, New PLC and Touchscreen Controller!

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Details:

STS MULTIPLEX ICP ASE ETCHER consisting of:

- Model: Multiplex ICP ASE
- Serial Number: 25443
- Vintage: December 2000
- Deep Silicon Etch Process (Bosch Process)
- Gas configuration: C4F8, SF6, O2, Ar
- On-Board Gas Box with Millipore 2901 MFCs installed
- Gas Line: Valve-MFC-Filter (VCR)
- ICP 240BF Source
- Electrode: 8" diameter
- Electrode Temperature Control (+5 to + 40deg C)
- Mechanical Wafer Clamp
- He Backside Cooling
- RF Power Supply: 300/30W (13.56MHz) and Matching Unit
- RF Power Supply: 1kW (13.56MHz) and Matching Unit
- Multiplex ICP SC160M Process Chamber (MESC)
- Loadlock - MESC Multiplex
- E-Rack Electronics Modules
- Dry Pump: Edwards iQDP80
- Turbo Pump: Leybold MAG1100
- System Chiller
- New PLC and Touchscreen Controller
- All Cables, Applicable Spares and Accessories
- Fully Refurbished to meet Original Factory Specifications by STS factory trained technicians!
- ClassOne Refurbishment Process for STS ICP Etchers: http://www.classoneequipment.com/content/etching-systems.
- ClassOne offers full installation and training as well as service and support of STS ICP etchers worldwide.

Vintage:

2000

Condition:

Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.

Delivery:

20 weeks

Price:

ID#: 3256