STS VPX Pegasus ICP Etcher
STS PEGASUS ICP ASE VPX CLUSTER SYSTEM consisting of:
- STS VPX Pegasus ICP
- 1 x Pegasus ICP Source (Siicon Etch Module)
- Brooks MX400 Cluster Core
- 1 x Vacuum Cassette Station
- Setup for 8"/200mm wafers
- Configured for Deep Silicon Etching
- Cassette to cassette auto-loading system
- Offers the most advanced technology for Deep Reactive Ion Etcing (DRIE) of Silicon
- Etch Rate: 25um/min
- Windows Software control PC
- PLC Based Control System
- Touch-Screen Operator Interface
- Single Vacuumm Cassette Load-Lock & Cluster Core
- Central 4-port cluster core with Brooks Robot
- 1 x Brooks VCE5 Vacuum Cassette Handler
- Brooks Robot Arm Adapter for 1x200mm substrates
- Electrostatic Chuck (200mm)
- Pro Electrostatic Electrode (-20C to +70C)
- Watlow 4x 700W Cartridge Heaters for Chamber Heating
- Includes High Reliability Upgrade
- Cleanroom Panel w/ 4 color Light Tower & Audible Alerts
- Leybold MAG2000CT Turbo Pump
- Alcatel ADS602 Backing Pump
- RF Generators: 3KW (13.56MHz) + 300/30W (13.56MHz) + LF5 500W (380KHz)
- Deep Silicon Trench Package
- Switched SOI process upgrade
- Smooth Sidewall Package including digital MFCs mounted on source
- Ramped Platen Controller
- Affinity PWG040 Chiller for Lower Electrode Cooling
- Affinity RWA12 Chiller for Upper Electrode Cooling
- Platen Chiller Temp Monitoring
- Serial Number: CP0108
- Year of Manufacture: 2006
On-Board Gas Box with the following Gas Configuration:
- C4F8 @ 400 SCCM
- SF6 @ 1200 SCCM
- O2 @ 200 SCCM
- Ar @ 200 SCCM
- N2 @ 200 SCCM
2006
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications
3 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
8 weeks
