SUSS MA6/BA6 MASK ALIGNER consisting of:
- Model: MA6
- Manufacturer: Suss MicroTec / Karl Suss
- Wafer Size: up to 6"/150mm Wafers (with proper chuck)
- Topside and Backside Alignment (TSA & BSA)
- Suss DVM6 Splitfield Microscope
- Objectives: 5x, 10x & 20x
- UV400 Optics (for 365nm and 405nm exposure)
- CIC1000 Power Supply
- Capable of Hard, Soft, Vacuum, and Proximity Contact
- 1000W Lamphouse
- Vibration Isolation Table (for Suss MA6)
- 1 Vacuum Chuck included (select from available sizes)
- 1 Maskholder included (select from available sizes)
- System Power: 230V, 50/60 Hz
- Operations Manual for Suss MA6 Mask Aligner
- Fully Refurbished by Suss factory trained technicians
Fully Reconditioned to Factory Specifications by ClassOne Equipment.Â
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.
Available for Full Inspection and Demo at our Facility. Â
6-8 weeks