Tepla 600 Plasma Asher
Model:
Tepla 600 Plasma Asher for sale
Price:
Request Price Quote ID#: 3049
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Details:
TEPLA 600 PLASMA ASHER consisting of:
- Model: 600 SemiAuto
- Semi-Automatic RF Plasma System
- Can process up to 150mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- MFCs: Brooks 5850 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D40 Vacuum Pump or equivalent (professionally rebuilt)
- Dimensions: 740mm x 624mm x 701mm + connections
- Weight: 135 kg (approximate)
- Electrical: 230V, 50/60Hz, 15A, 2kW
- Manufactured in 2003.
- Our used Tepla Ashers are fully refurbished to meet original specifications which includes:
- Brand new magnetron installed
- All o-rings and seals replaced with new
- All MFCs professional rebuilt and calibrated
- Vacuum pump professional rebuilt
- Complete system test and qualification.
- Available for full inspection and demonstration at ClassOne Equipment!
The Tepla 600 Semi-Auto Plasma System is used for the following processes among others:
- Photoresist stripping
- Surface cleaning after storage
- Surface cleaning after processes using oil pump or diffusion pump vacuum
- Surface cleaning as part of photolithography after wet developing
- Stripping of phtoresist layers after etching
- Removal of organic passivating layers and masks
- Etching of glass and ceramic
- Etching of SiO2, Si3N4, Si
- Removal of polyimide layers.
- Model: 600 SemiAuto
- Semi-Automatic RF Plasma System
- Can process up to 150mm wafers
- Used for photoresist stripping and surface cleaning, as well as etching silicon and its compounds
- Chamber Size: 245mm diameter, 380mm depth
- Chamber Material: ceramic
- ENI RF Generator: 0-600 Watt, 13.56 MHz
- Gases: 4 channels controlled by 4 MFCs
- MFCs: Brooks 5850 MFCs (professional rebuilt and calibrated)
- Computer: on-board, single card computer
- RS232 interface
- Software: up to 100 programs of 5 steps each can be entered
- Emergency Stop (EMO)
- Leybold D40 Vacuum Pump or equivalent (professionally rebuilt)
- Dimensions: 740mm x 624mm x 701mm + connections
- Weight: 135 kg (approximate)
- Electrical: 230V, 50/60Hz, 15A, 2kW
- Manufactured in 2003.
- Our used Tepla Ashers are fully refurbished to meet original specifications which includes:
- Brand new magnetron installed
- All o-rings and seals replaced with new
- All MFCs professional rebuilt and calibrated
- Vacuum pump professional rebuilt
- Complete system test and qualification.
- Available for full inspection and demonstration at ClassOne Equipment!
The Tepla 600 Semi-Auto Plasma System is used for the following processes among others:
- Photoresist stripping
- Surface cleaning after storage
- Surface cleaning after processes using oil pump or diffusion pump vacuum
- Surface cleaning as part of photolithography after wet developing
- Stripping of phtoresist layers after etching
- Removal of organic passivating layers and masks
- Etching of glass and ceramic
- Etching of SiO2, Si3N4, Si
- Removal of polyimide layers.
Vintage:
2003
Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Delivery:
4-6 weeks
