Thomas Swan CCS-MOCVD 6x2 Reactor

THOMAS SWAN CCS-MOCVD 6x2 REACTOR consisting of:

- 5 of 7 MO Sources currently in use
- Showerhead & Heater (2 years old)
- Pd cell H2 purifier
- Epison flow sensors on TMGa and TMIn
- KSA MiniMOS inisitu high resolution stress monitoring instrument
- Alcatel glovebox pump (new)
- Ebara 825 process pump (recently rebuilt)
- Alcatel regen pump
- Vintage 2000
- Spare parts available (sold separately)
- Systems are currently installed and can be inspected
- System has been used in R&D startup and used minimally

MO Sources: Currently 5 of 7 in use
- S1 Cp2Mg – 1
- S2 Cp2Mg – 2 (spare)
- S3 TMAl
- S4 TMGa – 2
- S5 TMGa – 1
- S6 TMIn – 1
- S7 TMIn – 2 (spare)

Gasses:
- SiH4
- NH3
- N2
- H2
- PH3 (for use if converted to III-V)
- AsH3 (for use if converted to III-V)

Systems are Currently Installed and can be Inspected.
Systems are being sold in AS-IS Condition.

2-4 weeks