Defect Inspection

Metrology Equipment

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Defect Inspection

Defect Inspection

Browse our complete inventory below or click here to learn why you should choose ClassOne for high quality Defect Inspection equipment.

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Manufacturer

Model

Configuration

NSX-90 Surface Inspection System

8"/200mm wafer capable, defect inspection system

2135 Surface Inspection System

Setup for 200mm wafers, SECS II/GEM Interface, Refurbished to specifications (M1189)

2138 Surface Inspection System

8”/200mm Wafers, ADC Option, SAT Option, SECS Compliant

2139 Surface Inspection System

8"/200mm Wafer Setup, Refurbished to Meet OEM Specifications

Macro Defect Inspection System

2800 User Interface

User Interface for KLA 2800, for parts support

8"/200mm Wafers, Auto Focus, Double Darkfield Inspection

8"/200mm wafers, Auto Focus, Double Darkfield Inspection

Patterned Surface Defect Inspection System, 8"/200mm Wafers

6"/150mm, 8"/200mm or 12"/300mm, Software Version 6.2, CE Marked

AIT XP Collector

KLA-Tencor AIT XP Collector

AIT XP Collector

KLA-Tencor AIT XP Collector

Archer Overlay Registration System

KLA-Tencor Archer Overlay Registration System

KLA-Tencor 6100 Candela Surface Inspection System

Unpatterned Wafer Surface Inspection Tool, up to 6”/150mm capable

Unpatterned Wafer Surface Inspection Tool, up to 6”/150mm Capable

Unpatterned Wafer Surface Inspection Tool, up to 6”/150mm capable

Unpatterned Wafer Surface Inspection Tool, up to 8”/200mm capable

Unpatterned Wafer Surface Inspection Tool, up to 8”/200mm capable

200mm Wafers, New Laser, Optics Aligned, New Power Supply, Calibrated to OEM specs

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM specifications, up to 8"/200mm wafer capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

New Laser, New Power Supply, Calibrated to OEM Specifications, up to 8"/200mm Wafer Capable

Surfscan SP1 Classic

200mm Open Cassette & 300mm FOUP configuration

Surfscan SP1 TBI

Edge Handler, BSIM, Dual Cassette, Refurbished to OEM Spec