Surface Metrology

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Metrology Equipment

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Manufacturer

Model

Configuration

Max Wafer

5100 Overlay Registration System

KLA-Tencor 5100 Overlay Registration System

5200XP Overlay Registration System

Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment), 8"/200mm Wafer Capable System

Alpha-Step IQ Profiler

6"/150mm Wafer Capable, Measurement Resolution to 1 Angstrom

P-10 Surface Profiler

KLA-Tencor P-10 Surface Profiler

P-22 (P22) Profiler

Automated Surface Profilometer, Calibrated to OEM Specifications, 8"/200mm Wafers, Automated Handler

Four Point Probe, 200mm, Manual Wafer Handling, Contour Mapping, 3-D Plots

Prometrix RS55/tc

Four Point Probe, 200mm, Temp Compensation, Manual Wafer Handling, Contour Mapping, 3-D Plots

Prometrix RS55/tc

Four Point Probe, 200mm, Temp Compensation, Manual Wafer Handling, Contour Mapping, 3-D Plots

Prometrix RS55/tca

Four Point Probe, Temp Compensation, 200mm, Manual Wafer Handling, Contour Mapping, 3-D Plots, Diameter Scans

Nanotronics

Optical Defect Inspection System, Fully Automated, Up to 200m Wafers

Nanotronics

3D Optical Profiler, Up to 200mm Wafers