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Manufacturer
Model
Configuration
Max Wafer
KLA-Tencor
5100 Overlay Registration System
KLA-Tencor 5100 Overlay Registration System
200mm
KLA-Tencor
5200XP Overlay Registration System
Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment), 8"/200mm Wafer Capable System
200mm
KLA-Tencor
P-22 (P22) Profiler
Automated Surface Profilometer, Calibrated to OEM Specifications, 8"/200mm Wafers, Automated Handler
200mm
KLA-Tencor
Prometrix RS50
Four Point Probe, 200mm, Manual Wafer Handling, Contour Mapping, 3-D Plots
200mm
KLA-Tencor
Prometrix RS55/tc
Four Point Probe, 200mm, Temp Compensation, Manual Wafer Handling, Contour Mapping, 3-D Plots
200mm
KLA-Tencor
Prometrix RS55/tc
Four Point Probe, 200mm, Temp Compensation, Manual Wafer Handling, Contour Mapping, 3-D Plots
200mm
KLA-Tencor
Prometrix RS55/tca
Four Point Probe, Temp Compensation, 200mm, Manual Wafer Handling, Contour Mapping, 3-D Plots, Diameter Scans
200mm
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ClassOne Equipment, Inc. 5302 Snapfinger Woods Drive, Decatur, Georgia 30035, United States
Tel: +1 770 808 8708, Fax: +1 770 808 8308, Email:
info@classoneequipment.com
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