Surface Metrology

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Metrology Equipment

Image

Manufacturer

Model

Configuration

Max Wafer

Overlay Registration System

Overlay Metrology System, Setup for 8"/200mm Wafers, Fully Robotic

ADE

ASC-2000 Controller for ADE 9500

ADE ASC-2000 Controller for ADE 9500

Alpha-Step 500 Profiler

6"/150mm Wafer Capable, Measurement Resolution to 1 Angstrom

Automated Surface Profilometer, Calibrated to OEM Specifications, 8"/200mm Wafers, Automated Handler

Prometrix RS55/tc

Four Point Probe, Temp Compensation, 200mm, Manual Wafer Handling, Contour Mapping, 3-D Plots

MTS

Nano Indenter SA2

Characterizes Material Surfaces down to the level of a few Nanometers

Dimension 3000 AFM

150mm Chuck, Nanoscope IIIa Controller

NT3300 Optical Profiler

Non-Contact Optical Profiler, Automatic Stage, 8"/200mm Wafers, 2006 vintage!