Semitool SRDs

Process Equipment

Semitool SRDs

Image

Manufacturer

Model

Configuration

Max Wafer

270S Single Stack SRD

Up to 6"/150mm Wafer Capable, Single Stack SRD, PSC-102 Controller

270S Single Stack SRD

Up to 6"/150mm Wafer Capable, Single Stack SRD, PSC-102 Controller

270S Single Stack SRD

Up to 6"/150mm Wafer Capable, Single Stack SRD, PSC-102 Controller

4"/100mm Max Wafer Capable, Single Stack with Cart, PSC-101 Controller!

8"/200mm Wafer Capable, Single Stack SRD, PSC-102 Controller

860S Dual Stack SRD

4"/100mm Wafer Capable, PSC-102 Controllers, Single Bolt Rotor Design

870S Dual Stack SRD

6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design

870S Dual Stack SRD

6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design

870S Dual Stack SRD

6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design

870S Dual Stack SRD

6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design

870S Dual Stack SRD

6"/150mm Wafer Capable, PSC-101 Controllers, Single Bolt Rotor Design

1600 Single Stack SRD

Up to 6"/150mm Wafer Capable, Single Stack SRD

6"/150mm Wafer Capable, Double Stack SRD