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Manufacturer
Model
Configuration
KLA-Tencor
2401 Viper
Macro Defect Inspection System
More Info
KLA-Tencor
Flexus 5400
200mm Wafers, Stress Measurement System, Fully Automated, Open Cassette Station
More Info
KLA-Tencor
FLX-2320
Stress Measurement System, 200mm Chuck, up to 500C, Data Analysis Capability
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Semitool
480S
8"/200mm Wafer Capable, Single Stack SRD, PSC-102 Controller
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Semitool
Scepter
8"/200mm, 50-Wafer Capacity (Two 25-Wafer Cassettes in Single Chamber)
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Semitool
Spray Solvent Tool (SST)
8"/200mm Capable, Single Chamber, 4-Tanks, Spray Solvent Tool
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Semitool
Spray Solvent Tool (SST) 2-Chamber
8"/200mm Capable, 2-Chamber, 5-Tank System, Spray Solvent Tool
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Semitool
Spray Solvent Tool (SST) 2-Chamber
8"/200mm Capable, 2-Chamber, 7-Tank System, Spray Solvent Tool
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SPTS
AOE
8"/200mm max, currently setup for 6"/150mm wafers, Helium Backside Cooling, Mechanical Wafer Clamping
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SPTS
MPX ICP PRO SR ETCHER
SiC, III-V, or Metal Etch, Single Chamber, Load-Locked, 2011 Vintage, Like-New!
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SPTS
MPX ICP SR Etcher
Single Chamber, Load-Locked, 2007 Vintage
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SPTS
Multiplex ICP SR Etcher
Single Chamber, Load-Locked
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Suss
MA6/BA6 Mask Aligner
Topside Alignment, 350W Lamphouse, UV400 Optics
More Info
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Tel: +1 770 808 8708, Fax: +1 770 808 8308, Email:
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