Applied Materials AMAT Centura II
OEM Part #:
OEM Name:
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Product Details:
APPLIED MATERIALS AMAT 5200 CENTURA II consisting of:
- Model: 5200 Centura II - 2 DPS / DTM Chambers - SBC System Controller w/ Vita Controller Upgrade - OTF - Ebara System & Load Lock Pumps - Configured for 150mm - Used Minimally for R&D & Light Production (~50k wafers run total) - Vintage: 2019
LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body - LLK A & B Indexer and Handler Type: Platform - LLK A & B Wafer Slide Detect: Present
ROBOTS:
- Transfer Chamber: HP+ - Transfer Chamber Blade: Ceramic
CHAMBER TYPE / LOCATION:
- Chamber A & B Chamber Body Type: DPS - DTM - Chamber A & B Process: Metal Etch - Chamber A & B Heater / Pedestal Type: DPS Cathode ESC - Chamber A & B Lid Type: DTCU w/ Dual Match - Chamber A & B RF Generator: APEX 5513 - Chamber A & B Match: MKS GHW12A - Chamber C, D & E Chamber Body Type: Blank - Chamber C, D & E Process: N/A - Chamber F Chamber Body Type: Orienter - Chamber F Heater / Pedestal Type: Standard
HEAT EXCHANGER CONFIGURATION:
- 3 Thermal Chillers Model 0190-32036 - 1 SMC Chiller Model 0190-53161
CHAMBER A & B GAS CONFIGURATIONS:
- CF4 - O2 - CHF3 - N2 - SF6 - Ar - HBR - Cl2 - C4F8
Condition:
Condition:
Being Sold in As-Is / Where-Is Condition.
Description:
Applied Materials AMAT Centura II
