Applied Materials AMAT Centura II CVD

APPLIED MATERIALS AMAT 5200 CENTURA II consisting of:
- Model: 5200 Centura II - 2 DxZ Chambers - SBC System Controller w/ Vita Controller Upgrade - Ebara Pumps - Configured for 200mm - Used Minimally for R&D & Light Production (~50k wafers run total) - Vintage: 2019
LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body - LLK A & B Indexer and Handler Type: Platform - LLK A & B Wafer Slide Detect: Present
ROBOTS:
- Transfer Chamber: HP+ - Transfer Chamber Blade: Ceramic
CHAMBER TYPE / LOCATION:
- Chamber A & B Chamber Body Type: DxZ Chamber - Chamber A & B Process: Silane or Nitrade - Chamber A & B Heater / Pedestal Type: MS Lift / DxZ Heater Lift - Chamber A & B Lid Type: DxZ Lid/w RPS unit - Chamber A & B RF Generator: PDX 900 2v - Chamber A & B Match: RFG2000 - Chamber C, D & E Chamber Body Type: Blank - Chamber C, D & E Process: N/A - Chamber F Chamber Body Type: Orienter - Chamber F Heater / Pedestal Type: Standard
HEAT EXCHANGER CONFIGURATION:
- SMC INR-498-012E-X 028 -32036
CHAMBER A & B GAS CONFIGURATIONS:
- SiH4 - NF3 - C3H6 - NH3 - N2O - O2 - He - Ar