Delta 5AQ Coater

OEM Part #:

5AQ

OEM Name:

Delta

ID #:

4796

Product Details:

Delta 5AQ Dual Positive Resist Coater consisting of:

- Computer
- 6" & 8" Cassette Nest 
- Dispense Arm (Qty 2) 
- EBR 
- Backside Rinse 
- Dual End Effector Transfer Arm 
- Qty 2 Cybor Programmable Metering Pump 
- Hot Plate 
- Canister 
- Hepa Filter
- SN: Delta 04
- Vintage: 2005

Condition:

Used

Condition:

As-Is / Where-Is Condition.

Description:

Delta 5AQ Positive Coater 

Additional Questions: