Delta 5AQ Coater
OEM Part #:
5AQ
OEM Name:
Delta
ID #:
4796
Product Details:
Delta 5AQ Dual Positive Resist Coater consisting of:
- Computer
- 6" & 8" Cassette Nest
- Dispense Arm (Qty 2)
- EBR
- Backside Rinse
- Dual End Effector Transfer Arm
- Qty 2 Cybor Programmable Metering Pump
- Hot Plate
- Canister
- Hepa Filter
- SN: Delta 04
- Vintage: 2005
- Computer
- 6" & 8" Cassette Nest
- Dispense Arm (Qty 2)
- EBR
- Backside Rinse
- Dual End Effector Transfer Arm
- Qty 2 Cybor Programmable Metering Pump
- Hot Plate
- Canister
- Hepa Filter
- SN: Delta 04
- Vintage: 2005
Condition:
Used
Condition:
As-Is / Where-Is Condition.
Description:
Delta 5AQ Positive Coater
Additional Questions:
Contact: sales@classoneequipment.com