EVG |6in/150mm BSA Wafer Chuck
OEM Part #:
NA
OEM Name:
EVG
ID #:
EV1106
Condition:
Tested
Description:
- EVG 620 Mask Aligner 6-Inch/150mm BSA Wafer Chuck for Hard and Soft Contact.
- Robot Loaded (3 Pin Holes) and N2 Purge Around Chuck.
- Found on EVG Mask Aligners, model EVG 620 (2008 and older).
- Please contact us for all your EVG Chuck needs!
- Robot Loaded (3 Pin Holes) and N2 Purge Around Chuck.
- Found on EVG Mask Aligners, model EVG 620 (2008 and older).
- Please contact us for all your EVG Chuck needs!
Additional Questions:
Contact: parts@classoneequipment.com
