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EVG 101 Spray Coating System

OEM Part #:

101 Spray Coating System

OEM Name:

EVG

ID #:

4542

Product Details:

EVG 101 SPRAY COATING SYSTEM consisting of:

- Model: EVG 101
- Semi-Automatic, with Manual loading
- Suitable for wafer sizes 1" - 6" wafers (with proper chucks and pre-aligner)
- Currently configured for 3" & 4" wafers
- One Coat Module
- One Cleaning Module
- Base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, and exhaust lines
- Manual loading and mechanical pre-aligner (pneumatically actuated)
- PC controlled with windows based graphical user interface
- Password protected access levels
- Programmable rotational speed for substrate
- Syringe dispense for spray nozzle option included
- Spinner chucks for 1" - 3" and 4" - 6" wafers
- 4 Floor Mounting Brackets included
- 1 Vacuum Wand for wafer handling
- Exhaust Controller included
- Operations Manual and Documentation included

Condition:

Used

Condition:

As-Is / Where-Is Condition.

Description:

EVG 101 Advanced Spray Coating System

Additional Questions: