KLA-Tencor | 6in/150mm 1.112nm Wafer Calibration Standard (PSL)
OEM Part #:
NA
OEM Name:
KLA-Tencor
ID #:
KT1548
Condition:
New
Description:
- 6 inch/150mm Wafer Calibration Standard. - Certified Full Deposition, 1.112nm nominal PSL diameter. - Used on KLA-Tencor Surfscan 6100, 6200, 6220, 6400, 6420 Defect Inspection Systems. - Used on KLA-Tencor AIT I and AIT II Patterned Surface Defect Inspection Systems. - Used on KLA-Tencor Surfscan SP1 Surface Inspection Systems. - Please contact us for all your KLA-Tencor Polystyrene Latex Spheres (PSL) NIST-Traceable and Non-NIST calibration wafer needs.
Additional Questions:
Contact: parts@classoneequipment.com
