KLA-Tencor | 12in/300mm PSL Wafer Calibration Standard Set (10 Wafers) for SP1 Tools
OEM Part #:
N/A
OEM Name:
KLA-Tencor
ID #:
KT3166
Condition:
New
Description:
- Set of 10 (ten) 12 inch/300 mm Silicon Wafer Calibration Standards (PSLs) for KLA-Tencor SP1 Tools. - 10 (ten) low haze wafers with Full deposition. - Includes PSL Nominal Diameters: .060, .083, .102, .126, .155, .204, .304, .360, 1.112, 3.040. - Each Wafer Calibration Standard includes a Certificate of Conformance, a Deposition Summary with Scan results, and a Certificate of Calibration and Traceability. - Used on KLA-Tencor Surfscan SP1 Surface Inspection Systems. - Please contact us for all your KLA-Tencor Polystyrene Latex Spheres (PSL) NIST-Traceable and Non-NIST calibration wafer needs.
Additional Questions:
Contact: parts@classoneequipment.com