KLA-Tencor | 6in/150mm .102nm Wafer Calibration Standard (PSL) for AIT I Tools
OEM Part #:
NA
OEM Name:
KLA-Tencor
ID #:
KT3173
Condition:
New
Description:
- 6 inch/150mm Wafer Calibration Standard. - Certified Full Deposition, .102nm nominal PSL diameter. - Used on KLA-Tencor AIT I (AIT 1)Patterned Surface Defect Inspection Systems. - Please contact us for all your KLA-Tencor Polystyrene Latex Spheres (PSL) NIST-Traceable and Non-NIST calibration wafers.
Additional Questions:
Contact: parts@classoneequipment.com
