Oxford Instruments Plasmalab System 100 ICP 180

OXFORD PLASMALAB 100 ICP 180 ETCHER consisting of:

- Manufacturer: Oxford Instruments
- Model: System 100 ICP 180
- Two Chamber Mechanical Roughing Pumps
- Load Lock pump
- Gas Panel
- Flow Meter Box
- LN2 Dewars
- Adjustable Water Manifold
- Voltage: 208V, 3P, Neutral and Earth
- Full Load Amps: 40 Amps
- 50/60Hz

Process gases used:

- SF6
- ARGON
- OXYGEN
- Silicon tetrachloride
- Boron trichloride
- Chlorine

REFURBISHED TO MEET OEM SPECIFICATIONS consisting of:

- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines cleaned.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Equipment is fully tested to verify compliance to specifications.
- Post-refurbishment system leak and RF calibration checks, with documentation provided to customer.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.