Oxford Plasmalab 100 RIE System
OEM Name:
Oxford
ID #:
4222
Product Details:
OXFORD PLASMALAB 100 RIE SYSTEM consisting of:
- Model: Plasmalab 100 Plus
- Up to 8"/200mm wafer handling
- Allows small batch processing for R&D and Pilot Production
- Load-locked System
- Computer, Keyboard, New Flat Panel Monitor
- System Chiller
- Turbo Pump
- Load Lock Pump
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications
Gas Module currently set up for the following gases (Capable of 6 Gases):
- Ar
- O2
- Cl2
- SiCl4
- Model: Plasmalab 100 Plus
- Up to 8"/200mm wafer handling
- Allows small batch processing for R&D and Pilot Production
- Load-locked System
- Computer, Keyboard, New Flat Panel Monitor
- System Chiller
- Turbo Pump
- Load Lock Pump
- Operations Manual and Documentation
- Offered as Fully Refurbished and Meeting Original Specifications
Gas Module currently set up for the following gases (Capable of 6 Gases):
- Ar
- O2
- Cl2
- SiCl4
Condition:
Refurbished
Condition:
Fully Refurbished to Factory Specifications by ClassOne Equipment.
6 Month Warranty and Specifications Guarantee.
30 Day Right of Return.
Description:
Oxford Plasmalab 100 RIE System
Additional Questions:
Contact: sales@classoneequipment.com
