Oxford Plasmalab 80 Plus PECVD System
OEM Part #:
Plasmapro NGP 80 PECVD
OEM Name:
Oxford
ID #:
5196
Product Details:
OXFORD PLASMAPRO NGP80 PECVD consisting of:
- Model: Oxford PlasmaPro NGP80 PECVD - Single Chamber PECVD, non-load locked - Ideal for R&D - Process: Oxide and Nitride - Internal Gas Box with 5 process gases (currently set up for: H2, NH3, Ar/5% SiH4, CHF4, N20, N2) - Dual frequency RF - System setup with universal platen (with ability to place various size(s) of substrates). - Up to 200mm wafer capable - System PC, Keyboard, Mouse - Edwards Vacuum Pump - Vintage 2011 - 208V AC, 60Hz
Condition:
Refurbished
Condition:
Excellent Condition Guaranteed. Fully Refurbished to Factory Specifications by ClassOne. 6 Month Warranty and Full Specifications Guarantee. 30 Day Right of Return.
As-Is/Where-Is Pricing is Also Available.
Description:
Oxford Plasmapro NGP 80 PECVD.
Additional Questions:
Contact: sales@classoneequipment.com
