Trident™ SRD
Spin Rinse Dryer
Batch Processing Systems
The Trident™ family of spin rinse dryers (SRDs) from ClassOne Technology is all-new equipment providing state-of-the-art technology in cleaning and rinsing wafers after wet processing — rapidly and efficiently removing residual chemicals and drying substrates completely without leaving water spots.
The system’s non-contact heating results in cleaner nitrogen gas (N2) because it places a filter after the heater and eliminates direct contact between N2 and the heater. Trident SRDs also use ultra-pure valves and fittings throughout, and all systems include a comprehensive facility panel to precisely control all pressures and flows. These are typical of the design advances and efficiencies that give Trident its uniquely attractive performance-to-price value.
Easy-to-use Trident SRD tools are available in bench-top, roll-around single-stack and dual-stack configurations, for processing up to 50 substrates per batch. The system accommodates 75mm to 200mm wafers, depending upon the model, chamber size and rotor used.
SRD 75mm-200mm Models
- 2800: Single stack, tabletop model
- 4800: Single stack, roll-around model
- 8800: Dual stack
Features
- Stainless steel cabinetry
- Negative-pressure motor seal
- Non-contact ultra-pure N2 heater
- Full-control facility panel
- Door-top DC ionizer
- Full wrap-around bowl heater
- PLC display with color touch screen
Benefits
- FM4910 compliance
- Much cleaner seal, reduced particles
- Cleaner N2
- Precise control of flows and pressures
- Reduced particles
- Optimum drying performance
- All components readily available
Trident SRD Standard Specifications
- Quick-disconnect rotor (single bolt)
- Rotors included (customer selects size)
- LCD Color touch screen
- Direct drive brushless motor
- All stainless-steel cabinetry
- Emergency power off (EPO), front and rear
- Foot-activated door-open switch
- Deionized water recirculation saver
- Resistivity monitor controller and probe
- Data logger
- Heater alarm
- Over temperature protection
- Ultra-pure Teflon pneumatic valves, pillar fittings
- Drain-trap connection
- All stainless steel, easy-access panels
- CE-certified
