Trident™ SST Spray Solvent
Batch Processing Systems
Highest performance and lowest cost of ownership SST
for 75-200mm substrates
ClassOne’s Trident™ family is the next generation of batch-processing Spray Solvent Tools (SSTs). They deliver a cascade of solvent or rinse water with maximum efficiency to enhance process performance, reduce chemical consumption and minimize process time and particles.
These advanced tools also provide a suite of features that maximize operator convenience and control, such as a color touch-screen display, a fully regulated facility panel, electronic flow meters, continuous monitoring level sensors and more. The systems include the powerful Windows-based SolarisTM controller as well as remote login, data logging, GEM/SECSII communications and reliability reporting.
Trident SST models are available for 75 to 200mm substrates — with one process chamber; two, four, six or eight heated chemical tanks; and a wide range of rotors.Trident SSTs increase uptime and productivity while significantly reducing capital expense — with system pricing that is significantly lower than competitive spray solvent tools.
Processes
- Metal Lift-Off
- Resist Stripping
- Polymer Removal
- Substrate Cleaning
- Resist Developing
Benefits
- Significantly lower capital expense
- Maximized productivity
- Increased uptime
- Reduced chemical consumption
- Shorter process time
- Fewer defects
- Easier control and operation
- Available for 75-200mm substrates
Trident SST Standard Specifications
- Windows-based Solaris controller
- Data logging
- GEM/SECSII communications
- Remote log-in
- Fully regulated attached facility panel
- Continuous monitoring level sensors
- Electronic flow meters
- See-through clear CPVC front door
- Mechanical door lock
- Up to 200mm capability, includes customer’s choice of rotor Vibration-free modular mounting system
- Cylindrical domed-bottom 5-gallon stainless steel tanks
- In-line tank heaters, contact or non-contact
- Remote N2 non-contact modular heater
- Adjustable N2 nozzles
- Recessed, non-obstructed DI manifold
- Direct drive brushless motor
- Emergency power off (EPO), front and rear
- Dynamic rotor-stop positioner
- Choice of pneumatic or magnetic coupled pumps
- Pneumatically operated Teflon valves
- All stainless-steel cabinetry, easy-access panels
- Integrated fire detection/suppression system
