Applied Materials AMAT Endura 5500

APPLIED MATERIALS AMAT 5500 ENDURA PVD consisting of:
- Model: 5500 Endura - 2 DPS / DTM Chambers - Ebara System & Load Lock Pumps - Configured for 200mm - Used Minimally for R&D & Light Production (~50k wafers run total) - Vintage: 2019
LOAD LOCK / CASSETTE CONFIGURATION:
- LLK A & B: Wide Body - LLK A & B Indexer and Handler Type: Platform
ROBOTS:
- Transfer Chamber: HP+ - Transfer Chamber Blade: Ceramic
CHAMBER TYPE / LOCATION:
- Chamber A: Pass-thru - Chamber B: Cool Down - Chamber C: Pre-Clean - Chamber C Process: PCII - Chamber D: Blank - Chamber 1: Blank - Chamber 2 & 3: Wide Body - Chamber 2 & 3 Process: Carbide or CrSi - Chamber 2 & 3 Heater: B101 Heater - Chamber 2 & 3 DC Supply: Pinnacle Plus-DC 0190-70897 - Chamber 2 & 3 RF Generator: Comdel CX600s 0190-63347
HEAT EXCHANGER CONFIGURATION:
- Neslab III
CHAMBER A & B GAS CONFIGURATIONS:
- Ar - N2 - O2