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Find Your Part Quickly


Simply click on the part categories below to see what is in our current inventory.
And be sure to check back because our inventory is constantly changing.


EVG

  • Mask Aligners
  • Wafer Bonders
  • Other EVG

KLA-Tencor

  • 21xx
  • 5100/5200
  • 6xxx
  • AIT 7600/7700
  • F5x
  • Profilers
  • RS35/55/75
  • SP1
  • UI Series
  • UV Series
  • Other KLA-Tencor

Semitool

  • Equinox
  • LT-210 / Paragon
  • Motors
  • Raider
  • Scepter
  • Spin Rinse Dryer (SRD)
  • Spray Acid Tool (SAT)
  • Spray Solvent Tool (SST)
  • Other Semitool

SUSS MicroTec

  • Mask Aligners
  • Wafer Bonders
  • Other SUSS

Takano

  • WM-10
  • WM-7S
  • WM-7SR

Other Parts

  • Other
  • Oxford
  • Plasma-Therm
  • SMC
  • SPTS
  • Vacuum Components

Repair Services & Support

  • KLA-Tencor
  • Semitool
  • SUSS
  • Other



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  • Popular Refurbished Brands

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  • SUSS and EVG
  • ...

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  • KLA-Tencor
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  • . . .

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