Our Refurbished
and Pre-Owned
KLA-Tencor Systems
KLA-Tencor has long been a respected name in wafer inspection and metrology equipment, and ClassOne Equipment has become one of the industry’s leading sources for these tools. Our inventory often includes both refurbished and as-is pre-owned systems. Our KLA-Tencor expertise includes wafer inspection, surface profilers, thin film measurement, overlay registration, resistivity measurement, stress measurement, and more.
We are able to deliver complete turn-key solutions, including everything from a fully operational system, to installation and training at your facility, to after-sales spare parts and field service support – we can provide as much or as little as you need. And we are able to back our systems with warranties on parts and labor and a 30-day return policy. Our high-quality refurbished tools can reduce your costs considerably compared with OEM prices while delivering exceptional quality and performance.
Examples of refurbishment we do on KLA-Tencor tools…
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as needed
- Handling system rebuilt or replaced (if applicable)
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- System de-installed following proper procedures
- System transport locks installed; system prepared for shipment
- Refurbishment carried out by KLA-Tencor-trained technicians
The ClassOne Advantage:
- Unparalleled attention to detail in the remanufacturing process; all new modern components and controllers installed, allowing the system to meet original specifications, for years to come.
- We provide a turn-key solution, from fully remanufactured system, to professional installation and training, as well as post-sale service and spare parts support.
- Industry leading, 6- or 12-month warranty on parts and labor.
- Largest inventory of spare parts available to support our remanufactured systems.
- Factory trained technicians available for professional installation, operations training, upgrades, as well as field service support from tool down trouble-shooting to preventive maintenance and trouble-shooting support.
Special Note:
If you’re looking at used Surfscan® wafer inspection tools
be sure to also check out our brand-new Takano systems!
Advanced new Takano wafer inspection systems incorporate state-of-the-art technology and deliver leading-edge performance – all at very attractive prices. Which is why they are fast becoming the industry’s favorite replacements for legacy Surfscan systems.
> See the new Takano WM-7sr for ≤200mm wafers.
> See the new Takano WM-10 for ≤300mm wafers.
KLA Models ClassOne Refurbishes, Services, and Supports:
Particle Detection
- Surfscan 5000
- Surfscan 5500
- Surfscan 6200
- Surfscan 6220
- Surfscan 6400
- Surfscan 6420
- Surfscan SP1
Patterned Wafer Defect Inspection
- AIT 1
- AIT 2
- AIT XP
- AIT XP+
- AIT UV
Thin Film Measurement
- UV1050
- UV1080
- UV1250
- UV1280se
- ASET F5x
Stress Measurement
- FLX-2320
- FLX-5400
Profilers
- Alpha Step-500
- AS-IQ
- P-10
- P-11
- P-12
- P-15
- P-16
- P-22
- HRP-220
- HRP-240
Overlay Metrology
- Archer 10
- Archer XT+
- Archer AIM+