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Our Refurbished
and Pre-Owned
KLA-Tencor Systems



KLA-Tencor has long been a respected name in wafer inspection and metrology equipment, and ClassOne Equipment has become one of the industry’s leading sources for these tools. Our inventory often includes both refurbished and as-is pre-owned systems. Our KLA-Tencor expertise includes wafer inspection, surface profilers, thin film measurement, overlay registration, resistivity measurement, stress measurement, and more.


We are able to deliver complete turn-key solutions, including everything from a fully operational system, to installation and training at your facility, to after-sales spare parts and field service support – we can provide as much or as little as you need. And we are able to back our systems with warranties on parts and labor and a 30-day return policy. Our high-quality refurbished tools can reduce your costs considerably compared with OEM prices while delivering exceptional quality and performance.



Examples of refurbishment we do on KLA-Tencor tools…


  • Replace used Laser with New Laser
  • Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
  • Replace used Power Supply, as required
  • Replacement or repair of any bad circuit board
  • Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
  • Optics assemblies cleaned and aligned to meet performance specifications or replaced as needed
  • Electronic assemblies tested to meet performance specifications or replaced as needed
  • Handling system rebuilt or replaced (if applicable)
  • Calibrate system using calibration wafers
  • Machine covers are cleaned, polished, or replaced, as needed
  • System de-installed following proper procedures
  • System transport locks installed; system prepared for shipment
  • Refurbishment carried out by KLA-Tencor-trained technicians



The ClassOne Advantage:


  • Unparalleled attention to detail in the remanufacturing process; all new modern components and controllers installed, allowing the system to meet original specifications, for years to come. 
  • We provide a turn-key solution, from fully remanufactured system, to professional installation and training, as well as post-sale service and spare parts support.
  • Industry leading, 6- or 12-month warranty on parts and labor.  
  • Largest inventory of spare parts available to support our remanufactured systems.
  • Factory trained technicians available for professional installation, operations training, upgrades, as well as field service support from tool down trouble-shooting to preventive maintenance and trouble-shooting support.






Special Note:

If you’re looking at used Surfscan® wafer inspection tools

be sure to also check out our brand-new Takano systems!


Advanced new Takano wafer inspection systems incorporate state-of-the-art technology and deliver leading-edge performance – all at very attractive prices. Which is why they are fast becoming the industry’s favorite replacements for legacy Surfscan systems.


> See the new Takano WM-7sr for ≤200mm wafers.


> See the new Takano WM-10 for ≤300mm wafers.







KLA Models ClassOne Refurbishes, Services, and Supports:


Particle Detection

  • Surfscan 5000
  • Surfscan 5500
  • Surfscan 6200
  • Surfscan 6220
  • Surfscan 6400
  • Surfscan 6420
  • Surfscan SP1


Patterned Wafer Defect Inspection

  • AIT 1
  • AIT 2
  • AIT XP
  • AIT XP+
  • AIT UV


Thin Film Measurement

  • UV1050
  • UV1080
  • UV1250
  • UV1280se
  • ASET F5x


Stress Measurement

  • FLX-2320
  • FLX-5400


Profilers

  • Alpha Step-500
  • AS-IQ
  • P-10
  • P-11
  • P-12
  • P-15
  • P-16
  • P-22
  • HRP-220
  • HRP-240


Overlay Metrology

  • Archer 10
  • Archer XT+
  • Archer AIM+