New Takano WM-10
≤300mm Wafer
Particle Inspection System

Takano – the #1 replacement for aging Surfscan® tools

This is the advanced technology solution for particle measurement on ≤300mm unpatterned wafers and the new industry-preferred replacement for legacy Surfscan® systems, The Takano WM-10 offers high-sensitivity particle measurements on bare or filmed wafers.

This tool can deliver reliable 48nm detection sensitivity along with high throughput and excellent repeatability. It is the advanced and cost-effective particle measurement solution for today’s requirements and for the future.

Hundreds of these tools have already been proven in daily use across Asia. Now, they are available in North America and Europe – exclusively from ClassOne Equipment.

Key Features & Benefits

• Advanced performance and superior cost-effectiveness
• 48nm particle detection sensitivity
• Dual laser angle (Optional)
• 70 WPH throughput
• Windows 10 operating system
• Long-life 405nm laser diode
• Single or dual FOUP or open-cassette handler
• Many options: Map Overlay, Haze Measurements, XY Coordinate Output, and more
• Extensive OEM parts and service support, available long-term
• Quality-manufactured in Japan
• One-year OEM warranty

Measurement Specifications

• Maximum detection sensitivity: 0.048µm
• Dynamic range: 0.048 – 5µm
• Reproducibility of detection: ≤1%
• Throughput: 70 WPH on 300mm wafers

Software/Hardware Options

• Dual-incident angle laser
• Map overlay function
• X-Y coordinate output
• Auto-sensitivity correction
• Haze measurement
• GEM300 communication
• Remote desktop
• ULPA-equipped Fan Filter Unit (FFU)
• Signal light tower
• Bare and filmed PSL calibration wafers