New Takano WM-7SR
≤200mm Wafer
Particle Inspection System
Takano – the industry-preferred new-technology replacement
for aging Surfscan® tools
This is the advanced technology solution for particle measurement on ≤200mm unpatterned wafers – which is why it has become the industry-preferred replacement for legacy Surfscan® systems, The Takano WM-7SR offers high-sensitivity particle measurements on bare or filmed wafers.
The WM-7SR can deliver best-in-class 61nm detection sensitivity along with high throughput and excellent repeatability. It is the most advanced and cost-effective particle measurement solution for today’s requirements and for the future.
Hundreds of these tools have already been proven in daily use across Asia. Now, they are available in North America and Europe – exclusively from ClassOne Equipment.
Key Features & Benefits
- Advanced performance and superior cost-effectiveness
- 79nm particle detection sensitivity (Standard)
- 61nm particle detection sensitivity (Optional)
- 60 WPH throughput
- Reproducibility of detection: <1%
- Windows 10 operating system
- 405nm laser diode at low incident angle
- Single open-cassette handler for 50-200mm wafers
- HEPA-equipped Fan Filter Unit (FFU)
- Signal tower
- Streamlined data outputs
- Extensive OEM parts and local service support, available long-term
- Quality-manufactured in Japan
- One-year OEM warranty
- Professional Installation and Training
- Local spare parts and factory trained service support
