Our Refurbished
SUSS and EVG
Mask Aligners and Bonders
The quality of new – at a fraction of the price
ClassOne Equipment has become the industry’s leading source for high-quality refurbished mask aligners and wafer bonders for semiconductor lithography applications. We carry an extensive inventory of refurbished mask aligners from top manufacturers SUSS MicroTec and EVG, including the Suss MJB3, MA6/BA6, MA8, MA150, MA200, and EVG 501, 520, 620 and 6200 systems and more.
ClassOne’s turn-key solution includes full refurbishment of the tool to original specifications, industry-leading 6- or 12-month warranties, as well as full installation and training by factory trained technicians. Spare parts support is also provided on all of our mask aligners and wafer bonders. And importantly, when you get a refurbished mask aligner or wafer bonder from ClassOne you can save over 60% off of OEM prices while still getting the maximum performance and reliability that your processes require.
SUSS/EVG Aligner Refurbishment Process:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
When Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt
SUSS/EVG Wafer Bonder Refurbishment Process:
- Subassemblies are completely disassembled, cleaned, lubricated, reassembled and adjusted.
- Lip seal replaced with New.
- Check/Replace heaters and thermocouples
- Verify all mechanical functions
- Professionaly refurbish vacuum pump
- Turbo vacuum pump
- Chiller inspected/repaired
- Wiring and tubing inspected/replaced
- Relays.
- Pneumatic Regulators.
- Pneumatic, electrical fittings.
- PC fully tested and hardrive image made.
- Monitor replaced with new flat screen LCD.
- Keyboard and mouse replaced with new.
- Cycle tests to verify functionality
- Machine is fully tested to verify compliance to original specifications
Mask Aligner Models:
- SUSS MJB3
- SUSS MJB4
- SUSS MA6
- SUSS MA8
- SUSS MA150
- SUSS MA200
- EVG 620
- EVG 6200
- EVG Smartview
Wafer Bonders:
- SUSS SB6
- SUSS SB8
- EVG 501
- EVG 520
- EVG Gemini
The ClassOne Advantage:
- Unparalleled attention to detail remanufacturing process; all new modern components and controllers installed, allowing the system to meet original specifications, for years to come.
- We provide a turn-key solution, from fully remanufactured system, to professional installation and training, as well as post-sale service and spare parts support.
- Industry leading, 6- or 12-month warranty on parts and labor.
- Largest inventory of spare parts available to support our remanufactured systems.
- Factory trained technicians available for professional installation, operations training, upgrades, as well as field service support from tool down trouble-shooting to preventive maintenance and trouble-shooting support.
