Our Refurbished
Plasma Etching
and PECVD Tools
From your etch and PECVD refurbishment specialists
ClassOne Equipment is the industry’s leading resource for first-quality refurbished plasma etch (RIE, DRIE, ICP) and deposition (PECVD) equipment from the top manufacturers: Oxford Instruments and Plasma-Therm.
Our factory-trained technicians provide a complete turn-key solution from a fully refurbished system meeting original specifications to installation and training at your facility with after-sales service and parts support. We back our systems with industry-leading warranties and a 30-day return policy.
Buying ClassOne's refurbished plasma etchers and PECVD equipment can save you up to 60% off OEM prices while providing exceptional quality and performance.
Etch/PECVD Refurbishment Process:
- Chamber disassembled for refurbishment.
- Chamber receives full wet clean.
- Chamber ceramics are professionally cleaned.
- O-rings and seals are replaced with brand new.
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers tested with water and repaired as needed.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and replaced if necessary.
- Major components disassembled for checkout, servicing, cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF tuning checks.
- System cycle and repeatability testing completed prior to cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.
The ClassOne Advantage:
- Unparalleled attention to detail remanufacturing process; all new modern components and controllers installed, allowing the system to meet original specifications, for years to come.
- We provide a turn-key solution, from fully remanufactured system, to professional installation and training, as well as post-sale service and spare parts support.
- Industry leading, 6- or 12-month warranty on parts and labor.
- Largest inventory of spare parts available to support our remanufactured systems.
- Factory trained technicians available for professional installation, operations training, upgrades, as well as field service support from tool down trouble-shooting to preventive maintenance and trouble-shooting support.
