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EVG 620 Mask Aligner (Upgraded from a 420)

OEM Part #:

620 Mask Aligner

OEM Name:

EVG

ID #:

5033

Product Details:

EVG 620 MASK ALIGNER consisting of:

- Model: EVG620 (Upgraded from a 420)
- Manual Mask Aligner
- Topside Alignment (TSA)
- Backside Ailgnment (BSA)
- Automatic Alignment
- Up to 6"/150mm Wafer Capable (with proper chuck)
- Objectives (Qty 2)
- Vacuum Chuck: request at time of order
- Maskholder: request at time of order
- Mask Load Frame: request at time of order
- Can be Operated in Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
- Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
- Lamphouse: 500W Lamphouse
- Exposure Optics: Type C, 350nm - 450nm, Broadband
- Microsoft Windows based User Interface
- System PC, Keyboard, Cables
- Operations Manual for EVG 620


Condition:

Used

Condition:

As-Is / Where-Is Condition.

Description:

EVG 620 Manual Mask Aligner System

Additional Questions: