KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM
OEM Part #:
ASET F5x Thin Film Measurement System
OEM Name:
KLA-Tencor
ID #:
5112
Product Details:
KLA-TENCOR ASET F5x THIN FILM MEASUREMENT SYSTEM consisting of:
- Model: ASET F5x - Can be configured to run either 200mm or 300mm wafers - Dual Cassette 300mm FOUP Handler or 200mm Open Cassette Handler - Spectroscopic ellipsometer - Dual-beam spectrometer (DBS) - Xenon light source with 220nm to 800nm wavelength range (1 Xenon Lamp) - Three user selectable DBS spot sizes: 2.7, 10, 40 um - Pattern Recognition (KLA F5x) - 450 hz MMX Computer - 9.1GB SCSI hard drive and 3.5” floppy disk drive - 128 Mb DRAM - Color VGA Monitor - KLA F5x Keyboard and trackball - Windows NT Operating System - 2.0 GB Random Access SCSI Jazz back-up drive (1 cartridge) - Ethernet PCIA Card - Multi-Layer Film Capacity - Micro Spot Optics - Scanning Stage (KLA F5x) - Wafer Mapping - In-Situ Capability - Controller Type: PC/VME - CE Marked - Operator Manual for KLA F5x SystemCondition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.
Description:
KLA F5x Thin Film Measurement System
