KLA-Tencor 5200XP Overlay Registration System

KLA-TENCOR 5200XP OVERLAY REGISTRATION SYSTEM consisting of:

- Model: 5200XP
- Overlay Registration(stepper alignment) and Critical Dimension (CD) Measurement System
- 8"/200mm Wafer Capable System
- Fully Automated Non-Contact Box-In-Box Measurement for Overlay Registration (stepper alignment). The Overlay Registration specification is 4nm per KLA’s published spec sheet
- Fully Automated Non-Contact CD Measurement and we recommend it to be used for CD’s the size of 1.5um or above
- Uses Proven Coherence Probe Microscopy (CPM) Technology
- Lowers Stepper Cost of Ownership. Includes KLASS (KLA Stepper Set-up Software) which allows the calculation of critical parameters for overlay control on lithography tools
- Measures all Layers, including Low-Contrast or Grainy Targets
- Operations Manual for KLA-Tencor 5200XP Overlay Registration System
- Refurbished to Meet Published KLA-Tencor 5200XP Specifications
- We can include installation, training, and warranty