KLA-Tencor AIT I Patterned Surface Defect Inspection System consisting
OEM Part #:
AIT I Patterned Surface Defect Inspection System
OEM Name:
KLA-Tencor
ID #:
4753
Product Details:
KLA-TENCOR AIT I PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT I Main System
- KLA-Tencor AIT I Mainframe
- Currently Configured for 6"/150mm & 8"/200mm Wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low Contact Chuck (AIT I)
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Pentium CPU with Windows NT Installed
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- High Voltage Electronics
- Front and Rear EMO’s with Covers
- Flat Panel Display for AIT
- Fold Down Keyboard Tray with Built In Mouse
- X/Y Drive/Controller Chassis and Motion Controller Card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
- Model: AIT I Main System
- KLA-Tencor AIT I Mainframe
- Currently Configured for 6"/150mm & 8"/200mm Wafers
- Double Darkfield Inspection Tool
- SECS II/GEM Communication Interface
- Low Contact Chuck (AIT I)
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Pentium CPU with Windows NT Installed
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- High Voltage Electronics
- Front and Rear EMO’s with Covers
- Flat Panel Display for AIT
- Fold Down Keyboard Tray with Built In Mouse
- X/Y Drive/Controller Chassis and Motion Controller Card
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
Condition:
Refurbished
Condition:
Excellent Condition Guaranteed.
6 Month Warranty.
30 Day Right of Return.
As-Is / Where-Is Pricing is Also Available.
6 Month Warranty.
30 Day Right of Return.
As-Is / Where-Is Pricing is Also Available.
Description:
KLA-Tencor AIT I Patterned Surface Defect Inspection System.
Additional Questions:
Contact: sales@classoneequipment.com
