KLA-Tencor AIT II Patterned Surface Defect Inspection System
OEM Part #:
AIT II Patterned Surface Defect Inspection System
OEM Name:
KLA-Tencor
ID #:
4007
Product Details:
KLA-TENCOR AIT II (200mm/300mm) PATTERNED SURFACE DEFECT INSPECTION SYSTEM consisting of:
- Model: AIT II
- Wafer Size: 200mm
- 150/200mm Open Handler
- Software Version 5.3.17.4
- Double Darkfield Inspection Tool
- SECS II / GEM Communication Interface
- Vacuum Chuck / Locator for 200mm Wafers
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Comes with Standard 10um Spot Sizes and also includes two expensive upgrades 5um and 7um Spot Sizes
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
- Model: AIT II
- Wafer Size: 200mm
- 150/200mm Open Handler
- Software Version 5.3.17.4
- Double Darkfield Inspection Tool
- SECS II / GEM Communication Interface
- Vacuum Chuck / Locator for 200mm Wafers
- Multi Channel Collection Optics System with Independent Programmable Spatial Filters
- Comes with Standard 10um Spot Sizes and also includes two expensive upgrades 5um and 7um Spot Sizes
- Wafer Transfer Area Housing Cover
- Wafer Handling Module
- Blower Box (exhaust hoses not included)
- Operations Manual and Documentation
Condition:
Refurbished
Condition:
Excellent Condition Guaranteed.
Fully Reconditioned to Factory Specifications by ClassOne.
6 Month Warranty and Full Specification Guarantee.
30 Day Right of Return.
Description:
KLA-Tencor AIT II Patterned Surface Defect Inspection System (KLA AIT 2).
Additional Questions:
Contact: sales@classoneequipment.com
