KLA-Tencor FLX-5400 Thin Film Stress Measurement System

KLA-TENCOR FLEXUS 5400 THIN FILM STRESS MEASUREMENT
SYSTEM consisting of:

- Model: 5400
- Configured for 200mm Wafers
- Single Cassette Station
- Minimum Scan Step: 0.02mm
- Maximum Points Per Scan: 1250

- Film Types:
- All Reflective Films Above 800A Thickness
- All Translucent Films Above 2000A Thickness

KLA-TENCOR REFURBISHMENT PROCESS consists of:

- Replace used Laser with New or Refurbished Laser
- Replace used Lamp or Probehead with Brand New Lamp or Probehead
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or replaced as
needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System de-installed following proper procedures
- System transport locks installed; system prepared for shipment
- Refurbishment carried out by KLA-Tencor trained technicians