KLA-Tencor P-10 Surface Profiler

KLA-TENCOR P-10 PROFILER consisting of:

- Model: P-10
- Manual wafer load profilometer
- Max wafer size: 8"/200mm
- Computer controlled
- Measures roughness, waviness, step height, and other surface characteristics
- Measures micro-roughness with up to 0.5Å (0.002 min.) resolution over short distances as well as waviness over a full, 60-mm scan.i thin
- Built-in PC computing power
- Operating System: Windows 3.1
- Windows base software control and data analysis
- Brand new stylus
- Brand new LCD monitor
- Lab Table for KLA P10 Profiler
- Operations Manual
- Refurbished to Meet Original KLA-Tencor P-10 Specifications
- Available for Full Inspection and Demonstration!
- 6 Months Warranty on Parts and Labor (Stylus is not covered under warranty)


More Information about the KLA P-10 Profiler:

- Measurement of vertical features ranging from under 100Å (0.4 min.) to approximately 300 µm (11 mils), with a vertical resolution of 0.5, 2, or 10Å.
- A virtually unlimited number of data points per profile guarantee that the horizontal resolution is limited by the stylus radius and not by the number of data points.
- Measurement of many roughness and waviness parameters, with user-selectable cutoff filters to isolate roughness and waviness.
- Ability to fit and level a scan, allowing accurate step height measurements on curved surfaces.
- Ability to detect the edge or apex of a profile feature, allowing automated data analysis relative to the feature.
- The KLA P-10 to repeat a scan up to ten times and automatically calculate the average, thereby minimizing the effects of environmental noise on measurements.


KLA-Tencor P10 can profile a variety of materials including:

- Semiconductor wafers
- Thin-film heads
- Precision-machined and polished surfaces
- Ceramics for micro-electronics
- Glass for flat panel displays
- Optical surfaces